Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143975 | Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off | Andrey Nikipelov, Vadim Yevgenyevich Banine, Joost André KLUGKIST, Maxim Aleksandrovich Nasalevich, Sando Wricke | 2021-10-12 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Joost André KLUGKIST, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich +4 more | 2021-04-13 |