Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Jeroen Gerard Gosen +4 more | 2021-12-14 |
| 10948825 | Method for removing photosensitive material on a substrate | Christianus Wilhelmus Johannes Berendsen, Güneş Nakibo{hacek over (g)}lu, Daan Daniel Johannes Antonius Van Sommeren, Gijsbert Rispens, Johan Franciscus Maria Beckers | 2021-03-16 |