Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens, Jeroen Gerard Gosen +4 more | 2021-12-14 |
| 11029607 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2021-06-08 |