Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199112 | Method and system for heat recovery | — | 2021-12-14 |
| 11143969 | Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus | Giovanni Luca Gattobigio, Nirupam Banerjee, Johan Franciscus Maria Beckers, Erik Henricus Egidius Catharina Eummelen, Ronald Frank KOX +4 more | 2021-10-12 |
| 11029607 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa, Rogier Hendrikus Magdalena Cortie +8 more | 2021-06-08 |
| 10969695 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more | 2021-04-06 |
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more | 2021-02-09 |