Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni, Ruud Olieslagers +5 more | 2021-02-09 |