Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more | 2021-12-14 |
| 11158484 | Electron beam inspection tool and method of controlling heat load | Dennis Herman Caspar Van Banning, Maarten Lambertus Henricus Ter Heerdt, Edwin Cornelis Kadijk | 2021-10-26 |
| 11139141 | Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus | Martijn Petrus Christianus Van Heumen | 2021-10-05 |