Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139141 | Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus | Jeroen Gerard Gosen | 2021-10-05 |
| 10948421 | Laser-driven photon source and inspection apparatus including such a laser-driven photon source | Sergii Denega, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Remco Marcel Van Dijk, Marc Van Kemenade | 2021-03-16 |