Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199771 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Theodorus Johannes Antonius Renckens, Jeroen Gerard Gosen +4 more | 2021-12-14 |