Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079687 | Process window based on defect probability | Abraham SLACHTER, Stefan Hunsche, Wim Tjibbo Tel, Anton Bernhard Van Oosten, Koenraad VAN INGEN SCHENAU +1 more | 2021-08-03 |
| 10948825 | Method for removing photosensitive material on a substrate | Christianus Wilhelmus Johannes Berendsen, Güneş Nakibo{hacek over (g)}lu, Daan Daniel Johannes Antonius Van Sommeren, Johan Franciscus Maria Beckers, Theodorus Johannes Antonius Renckens | 2021-03-16 |
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2021-02-02 |