Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036148 | Patterning device cooling system and method of thermally conditioning a patterning device | Hakki Ergün Cekli, Frank Johannes Jacobus Van Boxtel, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren | 2021-06-15 |
| 10948825 | Method for removing photosensitive material on a substrate | Christianus Wilhelmus Johannes Berendsen, Daan Daniel Johannes Antonius Van Sommeren, Gijsbert Rispens, Johan Franciscus Maria Beckers, Theodorus Johannes Antonius Renckens | 2021-03-16 |