Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048178 | Lithographic apparatus with improved patterning performance | Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, José Nilton Fonseca, Jr., Gerben Pieterse, Erik Henricus Egidius Catharina Eummelen | 2021-06-29 |
| 11036148 | Patterning device cooling system and method of thermally conditioning a patterning device | Hakki Ergün Cekli, Güneş Nakibo{hacek over (g)}lu, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren | 2021-06-15 |
| 11009800 | Measurement system, lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Günes NAKIBOGLU, Rita Marguerite Albin Lambertine Petit, Hermen Folken Pen, Remco Yuri Van De Moesdijk +1 more | 2021-05-18 |