Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009800 | Measurement system, lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Günes NAKIBOGLU, Rita Marguerite Albin Lambertine Petit, Hermen Folken Pen, Frank Johannes Jacobus Van Boxtel +1 more | 2021-05-18 |