Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009800 | Measurement system, lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Rita Marguerite Albin Lambertine Petit, Hermen Folken Pen, Remco Yuri Van De Moesdijk, Frank Johannes Jacobus Van Boxtel +1 more | 2021-05-18 |
| 10990025 | Patterning device cooling apparatus | Laurentius Johannes Adrianus Van Bokhoven, Ruud Hendrikus Martinus Johannes Bloks, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen | 2021-04-27 |
| 10895808 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more | 2021-01-19 |