Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016402 | Particle removal apparatus and associated system | Jeroen Van Duivenbode, Petrus Jacobus Maria VAN GILS, Petrus Johannes Van Den Oever | 2021-05-25 |
| 10895808 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Günes NAKIBOGLU, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more | 2021-01-19 |