Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895808 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more | 2021-01-19 |