Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098759 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2021-08-24 |
| 10895808 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more | 2021-01-19 |