Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11098759 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Mark Constant Johannes Baggen | 2021-08-24 |