Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187998 | Substrate holder, substrate support and method of clamping a substrate to a clamping system | Thomas POIESZ | 2021-11-30 |
| 11098759 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Antonie Hendrik Verweij, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2021-08-24 |
| 11086234 | Substrate holder and a method of manufacturing a device | Thomas POIESZ, Satish Achanta, Jeroen BOUWKNEGT | 2021-08-10 |