Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48668 | Temperature sensing probe, burl plate, lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Sander Catharina Reinier Derks | 2021-08-03 |
| 10990025 | Patterning device cooling apparatus | Laurentius Johannes Adrianus Van Bokhoven, Ruud Hendrikus Martinus Johannes Bloks, Günes NAKIBOGLU, Marinus Jan Remie | 2021-04-27 |