Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48668 | Temperature sensing probe, burl plate, lithographic apparatus and method | Thibault Simon Mathieu Laurent, Johan Gertrudis Cornelis Kunnen, Sander Catharina Reinier Derks | 2021-08-03 |