Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48668 | Temperature sensing probe, burl plate, lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Johan Gertrudis Cornelis Kunnen | 2021-08-03 |
| 10935895 | Lithographic apparatus | Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk, Franciscus Johannes Joseph Janssen +5 more | 2021-03-02 |