Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163240 | Heating system for an optical component of a lithographic apparatus | Marcus Adrianus Van De Kerkhof | 2021-11-02 |
| 10935895 | Lithographic apparatus | Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk +5 more | 2021-03-02 |