Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955595 | Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus | Koos Van Berkel | 2021-03-23 |
| 10935895 | Lithographic apparatus | Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk, Franciscus Johannes Joseph Janssen +5 more | 2021-03-02 |