Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048178 | Lithographic apparatus with improved patterning performance | Federico La Torre, José Nilton Fonseca, Jr., Gerben Pieterse, Erik Henricus Egidius Catharina Eummelen, Frank Johannes Jacobus Van Boxtel | 2021-06-29 |
| 10990025 | Patterning device cooling apparatus | Ruud Hendrikus Martinus Johannes Bloks, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen | 2021-04-27 |
| 10908517 | Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method | Jean-Philippe Xavier Van Damme, Petrus Franciscus Van Gils, Gerben Pieterse | 2021-02-02 |