Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11105619 | Measurement apparatus | Franciscus Godefridus Casper Bijnen, Junichi KANEHARA, Stefan Carolus Jacobus Antonius Keij, Thomas Augustus Mattaar | 2021-08-31 |
| 10908517 | Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method | Jean-Philippe Xavier Van Damme, Laurentius Johannes Adrianus Van Bokhoven, Gerben Pieterse | 2021-02-02 |