Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036148 | Patterning device cooling system and method of thermally conditioning a patterning device | Hakki Ergün Cekli, Güneş Nakibo{hacek over (g)}lu, Frank Johannes Jacobus Van Boxtel, Richard Johannes Franciscus Van Haren | 2021-06-15 |
| 10908517 | Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method | Laurentius Johannes Adrianus Van Bokhoven, Petrus Franciscus Van Gils, Gerben Pieterse | 2021-02-02 |