Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048178 | Lithographic apparatus with improved patterning performance | Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, José Nilton Fonseca, Jr., Erik Henricus Egidius Catharina Eummelen, Frank Johannes Jacobus Van Boxtel | 2021-06-29 |
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more | 2021-02-09 |
| 10908517 | Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method | Jean-Philippe Xavier Van Damme, Laurentius Johannes Adrianus Van Bokhoven, Petrus Franciscus Van Gils | 2021-02-02 |