Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11048178 | Lithographic apparatus with improved patterning performance | Federico La Torre, Laurentius Johannes Adrianus Van Bokhoven, Gerben Pieterse, Erik Henricus Egidius Catharina Eummelen, Frank Johannes Jacobus Van Boxtel | 2021-06-29 |