Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204558 | Particle suppression systems and methods | Yang-Shan Huang, Daniel Nathan Burbank | 2021-12-21 |
| 11187991 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more | 2021-11-30 |