Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187991 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more | 2021-11-30 |
| 11143968 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen +2 more | 2021-10-12 |
| 11016394 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more | 2021-05-25 |
| 10990015 | Debris mitigation system, radiation source and lithographic apparatus | Paul Peter Anna Antonius Brom, Ronald Johannes Hultermans | 2021-04-27 |