Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria ROVERS +2 more | 2021-06-08 |
| 11016394 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more | 2021-05-25 |
| 10962891 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +15 more | 2021-03-30 |