Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Johannes Marinus Maria ROVERS +2 more | 2021-06-08 |