Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022903 | Method for temperature control of a component | Harmen Krediet, Timo Laufer | 2021-06-01 |
| 10962891 | Lithographic apparatus and device manufacturing method | Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +15 more | 2021-03-30 |