Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187989 | Method for determining properties of an EUV source | Markus Hauf, Ulrich Mueller | 2021-11-30 |
| 11022903 | Method for temperature control of a component | Joeri Lof, Harmen Krediet | 2021-06-01 |