Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204558 | Particle suppression systems and methods | Daniel Nathan Burbank, Marco Koert Stavenga | 2021-12-21 |
| 11175596 | Particle traps and barriers for particle suppression | Han-Kwang Nienhuys, Ronald Peter Albright, Jacob Brinkert, Hendrikus Gijsbertus Schimmel, Antonie Hendrik Verweij | 2021-11-16 |
| 11137694 | Particle suppression systems and methods | Marcel Joseph Louis Boonen, Han-Kwang Nienhuys, Jacob Brinkert, Richard Joseph Bruls, Peter Kochersperger | 2021-10-05 |
| 11092902 | Method and apparatus for detecting substrate surface variations | Johannes F. M. D'Achard Van Enschut, Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Arie Jeffrey Den Boef +3 more | 2021-08-17 |
| 11003095 | Positioning system and lithographic apparatus | Krijn Frederik Bustraan, Antonius Franciscus Johannes De Groot, Minkyu Kim, Jasper Anne Frido Marikus Simons, Theo Anjes Maria Ruijl +1 more | 2021-05-11 |