Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156924 | Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Luc Leonardus Adrianus Martinus Meulendijks, Johannes Adrianus Cornelis Maria Pijnenburg | 2021-10-26 |
| 11003095 | Positioning system and lithographic apparatus | Krijn Frederik Bustraan, Yang-Shan Huang, Minkyu Kim, Jasper Anne Frido Marikus Simons, Theo Anjes Maria Ruijl +1 more | 2021-05-11 |
| 10908518 | Lithographic apparatus and method | Santiago E. DELPUERTO, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Matthew Lipson, Louis John Markoya +3 more | 2021-02-02 |