Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156924 | Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method | Luc Leonardus Adrianus Martinus Meulendijks, Antonius Franciscus Johannes De Groot, Johannes Adrianus Cornelis Maria Pijnenburg | 2021-10-26 |
| 11022901 | Positioning device, magnetic support system and lithographic apparatus | Hessel Bart Koolmees | 2021-06-01 |
| 10983431 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2021-04-20 |
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2021-02-02 |
| 10908518 | Lithographic apparatus and method | Santiago E. DELPUERTO, Antonius Franciscus Johannes De Groot, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Matthew Lipson +3 more | 2021-02-02 |