Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156924 | Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Luc Leonardus Adrianus Martinus Meulendijks, Antonius Franciscus Johannes De Groot | 2021-10-26 |
| 11086238 | System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support | Lucas Henricus Johannes Stevens, Nina Vladimirovna Dziomkina, Laura Maria Fernandez Diaz | 2021-08-10 |