Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086238 | System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support | Lucas Henricus Johannes Stevens, Nina Vladimirovna Dziomkina, Johannes Adrianus Cornelis Maria Pijnenburg | 2021-08-10 |