Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48676 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2021-08-10 |
| 11003094 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2021-05-11 |
| 10955757 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2021-03-23 |
| 10935895 | Lithographic apparatus | Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk +5 more | 2021-03-02 |
| 10908518 | Lithographic apparatus and method | Santiago E. DELPUERTO, Antonius Franciscus Johannes De Groot, Kenneth C. Henderson, Matthew Lipson, Louis John Markoya +3 more | 2021-02-02 |
| 10898955 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2021-01-26 |