Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48676 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre | 2021-08-10 |