Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175594 | Method of unloading an object from a support table | Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks, Justin Johannes Hermanus Gerritzen | 2021-11-16 |
| 11139196 | Substrate holder for use in a lithographic apparatus | Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more | 2021-10-05 |
| RE48676 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre | 2021-08-10 |