Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139196 | Substrate holder for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Mark Constant Johannes Baggen, Gijs Kramer, Roger Anton Marie Timmermans +1 more | 2021-10-05 |