Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121115 | Y-theta table for semiconductor equipment | Jan Van Eijk, Ronald Maarten Schneider, Timotheus Hubertus Christiaan Groothuijsen | 2021-09-14 |
| 11003095 | Positioning system and lithographic apparatus | Krijn Frederik Bustraan, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Minkyu Kim, Theo Anjes Maria Ruijl +1 more | 2021-05-11 |