Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092902 | Method and apparatus for detecting substrate surface variations | Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Yang-Shan Huang, Arie Jeffrey Den Boef +3 more | 2021-08-17 |