| 11204239 |
Metrology method, target and substrate |
Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more |
2021-12-21 |
$93,286,000 |
| 11143972 |
Method and apparatus to determine a patterning process parameter |
Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes, Maria Isabel De La Fuente Valentin +2 more |
2021-10-12 |
$55,748,000 |
| 11119415 |
Method of determining a characteristic of a structure, and metrology apparatus |
Johannes F. de Boer, Vasco Tomas Tenner, Christos MESSINIS |
2021-09-14 |
$244,229,000 |
| 11106142 |
Metrology recipe selection |
Kaustuve Bhattacharyya, Martin Jacobus Johan Jak |
2021-08-31 |
$96,013,000 |
| 11099489 |
Method of measuring a parameter of a lithographic process, metrology apparatus |
Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Erik Johan Koop, Armand Eugene Albert Koolen, Han-Kwang Nienhuys +2 more |
2021-08-24 |
$44,624,000 |
| 11092902 |
Method and apparatus for detecting substrate surface variations |
Johannes F. M. D'Achard Van Enschut, Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Yang-Shan Huang +3 more |
2021-08-17 |
$73,747,000 |
| 11080459 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2021-08-03 |
$147,580,000 |
| 11022902 |
Sensor, lithographic apparatus, and device manufacturing method |
Patricius Aloysius Jacobus Tinnemans, Haico Victor Kok, William Peter Van Drent, Sebastianus Adrianus GOORDEN |
2021-06-01 |
$41,772,000 |
| 11016397 |
Source separation from metrology data |
Scott Anderson Middlebrooks, Omer Abubaker Omer Adam, Adrianus Cornelis Matheus Koopman, Henricus Johannes Lambertus Megens |
2021-05-25 |
$54,027,000 |
| 11009343 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate |
Patricius Aloysius Jacobus Tinnemans, Vasco Tomas Tenner, Hugo Augustinus Joseph Cramer, Patrick Warnaar, Grzegorz Grzela +1 more |
2021-05-18 |
$75,541,000 |
| 10996571 |
Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured |
Robert John Socha, Nitesh Pandey |
2021-05-04 |
$52,009,000 |
| 10996570 |
Metrology method, patterning device, apparatus and computer program |
Zili Zhou, Nitesh Pandey, Olger Victor Zwier, Patrick Warnaar, Maurits Van Der Schaar +6 more |
2021-05-04 |
$52,009,000 |
| 10983445 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques |
Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen +7 more |
2021-04-20 |
$94,259,000 |
| 10955353 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more |
2021-03-23 |
$39,641,000 |
| 10901330 |
Recipe selection based on inter-recipe consistency |
Timothy Dugan Davis, Peter David Engblom, Kaustuve Bhattacharyya |
2021-01-26 |
$41,993,000 |
| 10895452 |
Metrology apparatus |
Marinus Johannes Maria Van Dam, Nitesh Pandey |
2021-01-19 |
$58,604,000 |
