Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079684 | Measurement apparatus and a method for determining a substrate grid | Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Youping Zhang | 2021-08-03 |
| 10996571 | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured | Arie Jeffrey Den Boef, Nitesh Pandey | 2021-05-04 |