Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187995 | Metrology using a plurality of metrology target measurement recipes | Victor Emanuel Calado, Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Xing Lan Liu | 2021-11-30 |
| 11092900 | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde, Anagnostis Tsiatmas, Adriaan Johan Van Leest, Alok Verma +3 more | 2021-08-17 |
| 11079684 | Measurement apparatus and a method for determining a substrate grid | Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Robert John Socha | 2021-08-03 |