Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079684 | Measurement apparatus and a method for determining a substrate grid | Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Robert John Socha, Youping Zhang | 2021-08-03 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees, Willem Seine Christian Roelofs +11 more | 2021-06-08 |
| 11016397 | Source separation from metrology data | Scott Anderson Middlebrooks, Omer Abubaker Omer Adam, Adrianus Cornelis Matheus Koopman, Arie Jeffrey Den Boef | 2021-05-25 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Sudharshanan Raghunathan, Boris Menchtchikov, Ahmet Koray Erdamar +13 more | 2021-03-30 |