Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204239 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2021-12-21 |
| 11016397 | Source separation from metrology data | Scott Anderson Middlebrooks, Adrianus Cornelis Matheus Koopman, Henricus Johannes Lambertus Megens, Arie Jeffrey Den Boef | 2021-05-25 |